Title:
OPTICAL ELEMENT SUPPORTING DEVICE AND DETECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/094876
Kind Code:
A1
Abstract:
An optical element supporting device (100), comprising: a base (20) comprising a supporting area on the top surface of the base; and a sealing ring (10) mounted on the top surface of the base (20) and used for bearing an optical element (600). when the sealing ring (10) bears the optical element (600), the optical element (600) is borne over the supporting area, and the sealing ring (10), the optical element (600), and the supporting area form a supporting cavity; the supporting cavity is filled with a fluid, and the fluid supports the optical element (600), prevents the optical element (600) from contacting the supporting area, and prevents the optical element (600) from deforming due to gravity.
Inventors:
NI MINGYANG (CN)
GUO KANG (CN)
PENG HAIFENG (CN)
SUN ZHEN (CN)
HUA YANGYANG (CN)
SUI YONGXIN (CN)
YANG HUAIJIANG (CN)
GUO KANG (CN)
PENG HAIFENG (CN)
SUN ZHEN (CN)
HUA YANGYANG (CN)
SUI YONGXIN (CN)
YANG HUAIJIANG (CN)
Application Number:
PCT/CN2017/072595
Publication Date:
May 31, 2018
Filing Date:
January 25, 2017
Export Citation:
Assignee:
CHANGCHUN INSTITUTE OF OPTICS FINE MECH AND PHYSICS CHINESE ACADEMY OF SCIENCE (CN)
International Classes:
G01M11/02
Foreign References:
| CN104457578A | 2015-03-25 | |||
| CN101520320A | 2009-09-02 | |||
| CN101283260A | 2008-10-08 | |||
| JP2011252769A | 2011-12-15 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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