Title:
OPTICAL ELEMENT
Document Type and Number:
WIPO Patent Application WO/2016/080317
Kind Code:
A1
Abstract:
An optical filter device (1000) is provided with: a first mirror (101) that allows transmission of part of incident light; a second mirror (201) disposed with a gap opened from the first mirror (101) and allowing transmission of part of the incident light; actuators (300, 300) for driving the first mirror (101) and changing the gap between the first mirror (101) and the second mirror (201); and a detection electrode (400) for detecting displacement of the first mirror (101). The detection electrode (400) has a movable comb tooth electrode (410) including a plurality of movable comb teeth (414, 414, …) and linked to the first mirror (101) and a fixed comb tooth electrode (420) that includes a plurality of fixed comb teeth (424, 424, …) facing the movable comb teeth (414, 414, …) in a state parallel to each other. A movable comb tooth (414) is displaced in a state parallel to a fixed comb tooth (424) when the movable comb tooth electrode (410) is displaced integrally with the first mirror (101).
Inventors:
UCHINO RYOHEI (JP)
Application Number:
PCT/JP2015/082020
Publication Date:
May 26, 2016
Filing Date:
November 13, 2015
Export Citation:
Assignee:
SUMITOMO PRECISION PROD CO (JP)
International Classes:
G02B26/00; B81B3/00; G02B26/02
Domestic Patent References:
| WO2014156060A1 | 2014-10-02 |
Foreign References:
| JP2015102483A | 2015-06-04 | |||
| JP2013178418A | 2013-09-09 | |||
| JP2004510183A | 2004-04-02 |
Attorney, Agent or Firm:
MAEDA & PARTNERS (JP)
Patent business corporation MAEDA PATENT OFFICE (JP)
Patent business corporation MAEDA PATENT OFFICE (JP)
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