OPTICAL FILTERING DEVICE AND MEMS SHUTTER

Title:

OPTICAL FILTERING DEVICE AND MEMS SHUTTER

Document Type and Number:

WIPO Patent Application WO/2024/009340

Kind Code:

A1

Abstract:

Provided is an optical filtering device used as a spatial filter for a dark field optical microscope, wherein the optical filtering device is highly reliable and is capable of controlling a shutter at a desired opening angle without fully opening the shutter. This optical filtering device is characterized in that: the optical filtering device comprises a shutter that can be opened and closed through voltage control, and a substrate having a shutter opening part that is the movable range of the shutter; the substrate has a stopper disposed extending in the thickness direction of the substrate on a side surface of the shutter opening part, and of which any cross sections in the thickness direction of the substrate have substantially the same shape; the shutter has a cut-out part; and the cut-out part abuts on the stopper when the shutter is opened.

More Like This:

WO/2003/052476	OPTICAL DEVICE COMPRISING A LIQUID OPTICAL AGENT
WO/2010/149583	LIGHTING DEVICE FOR A DIRECT VIEWING DISPLAY

Inventors:

YOSHIMURA YASUHIRO (JP)
TOMOTSUNE HITOYUKI (JP)
KANAMARU MASATOSHI (JP)
AONO TAKANORI (JP)
OTANI YUKO (JP)
KANZAKI NOBUHIKO (JP)

Application Number:

PCT/JP2022/026555

Publication Date:

January 11, 2024

Filing Date:

July 04, 2022

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP (JP)

International Classes:

G02B26/02; B81B3/00; G02B21/00; H01L21/66

Domestic Patent References:

WO2021192017A1

2021-09-30

Foreign References:

JPH116968A	1999-01-12
JPH11212000A	1999-08-06
JP2000089138A	2000-03-31

Attorney, Agent or Firm:

POLAIRE I.P.C. (JP)

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