OPTICAL INNER SURFACE MEASUREMENT DEVICE

WIPO Patent Application WO/2016/084638

A1

[Problem] To provide an optical inner surface measurement device which is setup-free, that is, which does not require adjusting the parallelism and coaxiality between a measurement probe and an object to be measured, and which enables precise accuracy measurement of an inner diameter and an inner peripheral surface. [Solution] An optical inner surface measurement device comprises: an optical fiber built in a tube; at least two optical path conversion means disposed at the leading end side of the optical fiber; and a motor for rotating either or both of the optical path conversion means, and emits light three-dimensionally in a circumferential direction and in an axial direction by operations (including a rotation operation) of the optical path conversion means while the feed of the tube in the axial direction is stopped. Further, the optical inner surface measurement device is provided with a displacement detection means for measuring the amount of runout of a rotating shaft part of the motor, and can perform high-accuracy measurement by correcting shape data of an inner peripheral surface of an object to be inspected by displacement amount data from the displacement measurement means, the shape data being obtained by calculating reflected light from the object to be inspected by a computer.

YAMAZAKI HIROSHI (JP)
FUKUSHIMA ERI (JP)
YANAGIURA KAZUMI (JP)
ASADA TAKAFUMI (JP)

PCT/JP2015/082088

June 02, 2016

November 16, 2015

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NAMIKI PRECISION JEWEL CO LTD (JP)

G01B11/24; G01B21/00; G01B21/14

WO2014054666A1	2014-04-10
WO2015022760A1	2015-02-19

JPH11281331A	1999-10-15
JP2009236614A	2009-10-15
US5325177A	1994-06-28

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