Title:
OPTICAL INTEGRATOR, ILLUMINATION OPTICAL DEVICE, EXPOSURE APPARATUS, AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2004/008507
Kind Code:
A1
Abstract:
An optical integrator having a property of lessening the influence of the manufacture variation of a plurality of small refraction surfaces integrally formed by, e.g., etching on the illumination distribution. The optical integrator (8) comprising a plurality of first small refraction surfaces (80a) that are integrally formed and a plurality of second small refraction surfaces (80b) that are integrally formed, wherein a parameter β expressed by β=(&gammad -1)3·NA2/ &Dgr n2 satisfies the condition &Verbar β&Verbar <0.2 where &gammad is the ratio &phgr a/&phgr b of the refractive power &phgr a of the first small refraction surfaces to the refractive power &phgr b of the second small refraction surfaces, NA is the numerical aperture of the output side of the optical integrator, and n is the difference in index of refraction of the medium between the light input and output sides of the second small refraction surfaces.
Inventors:
TOYODA MITSUNORI (JP)
Application Number:
PCT/JP2003/007691
Publication Date:
January 22, 2004
Filing Date:
June 17, 2003
Export Citation:
Assignee:
NIKON CORP (JP)
TOYODA MITSUNORI (JP)
TOYODA MITSUNORI (JP)
International Classes:
G02B3/00; G02B3/06; G02B5/02; G02B13/24; G02B19/00; G02B27/09; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G02B13/00; G02B19/00; G03F7/20
Domestic Patent References:
| WO2001061411A1 | 2001-08-23 |
Foreign References:
| EP1180726A2 | 2002-02-20 | |||
| DE10062579A1 | 2001-06-21 | |||
| US6414795B1 | 2002-07-02 | |||
| US6323937B1 | 2001-11-27 | |||
| US6285440B1 | 2001-09-04 | |||
| EP0668541A1 | 1995-08-23 | |||
| JPH06175028A | 1994-06-24 |
Other References:
See also references of EP 1548803A4
Attorney, Agent or Firm:
Yamaguchi, Takao (10 Kanda-tsukasacho 2-chom, Chiyoda-ku Tokyo, JP)
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