Title:
OPTICAL INTERFERENCE MEASURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/208018
Kind Code:
A1
Abstract:
An optical interference measuring apparatus is disclosed. The optical interference measuring apparatus according to an embodiment of the present invention is designed to measure the surface of an object to be measured, by using interference fringes, and comprises: a broadband light source; an optical delay system which splits a laser beam output from the broadband light source into two laser beams having a time delay, combines the two split laser beams, and outputs the same; and an interferometer connected to the optical delay system by an optical fiber, so as to create interference fringes by producing interference between a reference beam obtained when the combined laser beam output from the optical delay system is reflected from a reference mirror and a measurement beam obtained when the combined laser beam is transmitted through the reference mirror and reflected from the object to be measured.
Inventors:
PARK JAE-SEOK (KR)
YOO JEONG-SOO (KR)
YOO JEONG-SOO (KR)
Application Number:
PCT/KR2018/004203
Publication Date:
November 15, 2018
Filing Date:
April 10, 2018
Export Citation:
Assignee:
HUMEN CO LTD (KR)
International Classes:
G01B9/02; G01B11/30; G02B27/10; G02B27/28
Foreign References:
| JP2013152243A | 2013-08-08 | |||
| JP2002514301A | 2002-05-14 | |||
| JP2000121318A | 2000-04-28 | |||
| JPH06129812A | 1994-05-13 | |||
| KR101628761B1 | 2016-06-09 |
Attorney, Agent or Firm:
SELIM INTELLECTUAL PROPERTY LAW FIRM (KR)
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