Title:
OPTICAL INTERFEROMETER DEVICE TOLERANT TO INACCURACY IN DOPING OVERLAY
Document Type and Number:
WIPO Patent Application WO/2017/211158
Kind Code:
A1
Abstract:
An optical interferometer device (20) is provided including a waveguide interferometer. The waveguide interferometer includes a first waveguide arm (22) and a second waveguide arm (24) in a waveguide plane, each waveguide arm including a n-type region and a p-type region forming a junction (26, 28). The n-type region and the p-type region of the second waveguide arm are translationally symmetric with respect to the n-type region and the p-type region, respectively, of the first waveguide arm in the waveguide plane.
Inventors:
GOODWILL DOMINIC JOHN (CA)
JIANG JIA (CA)
JIANG JIA (CA)
Application Number:
PCT/CN2017/083781
Publication Date:
December 14, 2017
Filing Date:
May 10, 2017
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
G02F1/015; G02B6/26
Domestic Patent References:
| WO2011022308A2 | 2011-02-24 |
Foreign References:
| CN102967951A | 2013-03-13 | |||
| CN101937135A | 2011-01-05 | |||
| JP2009037013A | 2009-02-19 | |||
| CN105044931A | 2015-11-11 | |||
| US20100316324A1 | 2010-12-16 | |||
| US20140286647A1 | 2014-09-25 |
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