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Title:
OPTICAL INTERFEROMETER AND OPTICAL INTERFEROMETRY METHOD
Document Type and Number:
WIPO Patent Application WO/2020/241584
Kind Code:
A1
Abstract:
This optical interferometer reduces noise in interferograms in optical interferometry. This optical interferometer (1) is characterized by being provided with a measurement unit (2) which irradiates a measurement target and a reference surface with electromagnetic waves and creates interference between the reflected waves from the reflective surface of the measurement target and reflected waves from the reference surface to acquire a reference wave interferogram, and a signal processing unit which configures a depth-direction intensity profile by means of a Fourier transform of the interferogram, wherein the signal processing unit (8) is provided with a first noise removal unit (301) which, having a region based on a measurement target configured position as the pass region, performs filtering by removing data in the region outside of the pass region from the intensity profile and reconfigures the filtered intensity profile into an interferogram by means of reverse Fourier transformation.

Inventors:
MOMIYAMA HOMARE (JP)
SASAKI YOSHIAKI (JP)
YOSHIMINE ISAO (JP)
OTANI CHIKO (JP)
YUASA TETSUYA (JP)
Application Number:
PCT/JP2020/020586
Publication Date:
December 03, 2020
Filing Date:
May 25, 2020
Export Citation:
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Assignee:
TOPCON CORP (JP)
RIKEN (JP)
International Classes:
G01B9/02; G01N21/17
Domestic Patent References:
WO2015001918A12015-01-08
Foreign References:
JP2014021127A2014-02-03
JP2008175698A2008-07-31
US20090263040A12009-10-22
Other References:
SEELAMANTULA, C S ET AL.: "Super-Resolution Reconstruction in Frequency- Domain Optical-Coherence Tomography Using the Finite-Rate-of-Innovation Principle", IEEE TRANSACTIONS ON SIGNAL PROCESSING, vol. 62, no. 19, 17 July 2014 (2014-07-17), pages 5020 - 5029, XP011557578, DOI: 10.1109/TSP.2014.2340811
CHEN, H ET AL.: "Speckle reduction based on fractional-order filtering and boosted singular value shrinkage for optical coherence tomography image", BIOMEDICAL SIGNAL PROCESSING AND CONTROL, vol. 52, 9 May 2019 (2019-05-09), pages 281 - 292, XP085711453, DOI: https://doi.org/10. 1016/j. bspc. 2019.04.03 3
Attorney, Agent or Firm:
YAGI Hidehito et al. (JP)
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