OPTICAL INTERFEROMETRIC RANGING SENSOR

WIPO Patent Application WO/2024/048103

A1

Provided is an optical interferometric ranging sensor that makes it possible to properly measure the distance to a measurement target, while alleviating the influence of light reflected by an optical element disposed in a sensor head. An optical interferometric ranging sensor 100 is provided with: a light source 110 that projects light while changing the wavelength of the light; an interferometer 120 to which the light projected from the light source 110 is supplied and that generates interference light based on measurement light and reference light, the measurement light being radiated onto a measurement target T by a sensor head 102 and being reflected by the measurement target T, and the reference light following an optical path at least partially different from that of the measurement light; a light reception unit 130 that receives the interference light and converts the interference light into an electrical signal; and a processing unit 140 that calculates the distance to the measurement target T on the basis of the electrical signal. The sensor head 102 includes an optical element 170 disposed so as to be tilted by a prescribed angle with respect to a direction perpendicular to the optical axis L of light radiated from an optical fiber 150 to the inside of the sensor head 102.

NAGASAKI YUSUKE (JP)
KIMURA KAZUYA (JP)

PCT/JP2023/026344

March 07, 2024

July 19, 2023

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OMRON TATEISI ELECTRONICS CO (JP)

G01B11/00; G01B9/02004; G01B9/02056

JP2018084434A	2018-05-31
JP2008268093A	2008-11-06
JPS62184406U	1987-11-24
JP2006322912A	2006-11-30

INABA, Yoshiyuki et al. (JP)

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