Title:
OPTICAL MANUFACTURING PROCESS SENSING AND STATUS INDICATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2015/148702
Kind Code:
A8
Abstract:
An optical manufacturing process sensing and status indication system is taught that is able to utilize optical emissions from a manufacturing process to infer the state of the process. In one case, it is able to use these optical emissions to distinguish thermal phenomena on two timescales and to perform feature extraction and classification so that nominal process conditions may be uniquely distinguished from off-nominal process conditions at a given instant in time or over a sequential series of instants in time occurring over the duration of the manufacturing process. In other case, it is able to utilize these optical emissions to derive corresponding spectra and identify features within those spectra so that nominal process conditions may be uniquely distinguished from off-nominal process conditions at a given instant in time or over a sequential series of instants in time occurring over the duration of the manufacturing process.
Inventors:
DAVE VIVEK R (US)
COLA MARK J (US)
MADIGAN BRUCE (US)
PILTCH MARTIN S (US)
CASTRO ALBERTO (US)
COLA MARK J (US)
MADIGAN BRUCE (US)
PILTCH MARTIN S (US)
CASTRO ALBERTO (US)
Application Number:
PCT/US2015/022539
Publication Date:
November 19, 2015
Filing Date:
March 25, 2015
Export Citation:
Assignee:
SIGMA LABS INC (US)
International Classes:
G01N21/17; C12M1/36; C12M1/38; H05B1/02
Attorney, Agent or Firm:
WIGGER, Benjamin D et al. (Two Embarcadero Center 8th Floo, San Francisco CA, US)
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