Title:
OPTICAL MEASUREMENT DEVICE, CHEMICAL SUBSTANCE SUPPLY DEVICE COMPRISING OPTICAL MEASUREMENT DEVICE, AND PROCESS DEVICE USING CHEMICAL SUBSTANCE COMPRISING OPTICAL MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/111430
Kind Code:
A1
Abstract:
The present invention relates to an optical measurement device, a chemical substance supply device comprising the optical measurement device, and a process device using a chemical substance comprising the optical measurement device. An optical measurement device according to an embodiment of the present invention comprises: a light source; a transmission unit comprising a body, a first surface which is one of the outer surfaces of the body, a second surface opposite the first surface, an incident surface to which light emitted from the light source is incident inside the body, a contact surface disposed on the first surface and in contact with the sample, and an emission surface disposed on the second surface and through which light incident to the body is emitted outside; and a detection unit for receiving light emitted from the transmission unit, wherein D1, which is the shortest distance between a central portion of the incident surface and the first surface, and D2, which is the shortest distance between the emission surface and the first surface, satisfy D1 < D2.
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Inventors:
CHO HAEYEON (KR)
Application Number:
PCT/KR2019/008439
Publication Date:
June 04, 2020
Filing Date:
July 09, 2019
Export Citation:
Assignee:
CHO HAEYEON (KR)
International Classes:
G01N21/43; G01N21/27
Foreign References:
| JPH06140488A | 1994-05-20 | |||
| KR20180057955A | 2018-05-31 | |||
| KR20080100343A | 2008-11-17 | |||
| KR100402508B1 | 2003-10-22 | |||
| US20120081698A1 | 2012-04-05 |
Attorney, Agent or Firm:
PARK, Sang-Hwan (KR)
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