Title:
OPTICAL MEASUREMENT DEVICE AND OPTICAL MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2011/052295
Kind Code:
A1
Abstract:
Disclosed are an optical measurement device and optical measurement method that can measure the properties of a sample with high precision, even if the area of the surface of the sample to be measured is small, or even if the measurement is performed using light with a large angle of incidence. The disclosed optical measurement device is provided with: a terahertz light source that emits light in the terahertz frequency region; a photodetector that detects light; an optical mechanism that guides the light emitted from the terahertz light source to the sample (6) to be measured, and then guides reflected light reflected from the sample (6) to the photodetector; and a sample-holding mechanism (13) that holds the sample (6). The sample-holding mechanism (13) holds the sample (6) via suction on the side opposite the surface to be measured. The sample-holding mechanism (13) holds the sample (6) on a flat suction surface that has a smaller surface area than the sample (6).
Inventors:
MATSUMOTO NAOKI (JP)
Application Number:
PCT/JP2010/065139
Publication Date:
May 05, 2011
Filing Date:
September 03, 2010
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
MATSUMOTO NAOKI (JP)
MATSUMOTO NAOKI (JP)
International Classes:
G01N21/35; G01N21/01; G01N21/41
Foreign References:
| JP2003121355A | 2003-04-23 | |||
| JP2007232486A | 2007-09-13 | |||
| JP2008268059A | 2008-11-06 |
Attorney, Agent or Firm:
FUKUNAGA Masaya (JP)
Masaya Fukunaga (JP)
Masaya Fukunaga (JP)
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