OPTICAL MEASUREMENT DEVICE AND OPTICAL MEASUREMENT METHOD

WIPO Patent Application WO/2019/098005

A1

The present invention has a light source that irradiates an object to be measured with light, a branching part that branches transmission light or reflection light from the object to be measured, a phase change unit that changes the phase of one of the branched lights, a phase-fixing unit that maintains the phase of the other of the branched lights, a combination unit that combines output lights from the phase change unit and the phase-fixing unit and causes interference between the lights, a detection unit that detects output light (an interference image) from the combination unit, and a control unit, the control unit: extracting a reference point of the object to be measured from the interference image; correcting a luminance value for each pixel in each interference image, in association with displacement of the object to be measured as indicated by displacement of the reference point, when displacement of the reference point is detected; and constructing an interferogram on the basis of the corrected luminance value for each pixel in each interference image.

AKAGAWA TAKESHI (JP)
KUBO MASAHIRO (JP)
ABE KATSUMI (JP)
ALTINTAS ERSIN (JP)
OHNO YUJI (JP)
ARIYAMA TETSURI (JP)
ISHIMARU ICHIRO (JP)

PCT/JP2018/040225

May 23, 2019

October 30, 2018

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NEC CORP (JP)
UNIV KAGAWA NAT UNIV CORP (JP)

G01N21/45; G01J3/45

JP2016008956A	2016-01-18
JP2012010960A	2012-01-19
JP2015031831A	2015-02-16
US20070242277A1	2007-10-18
US20100280321A1	2010-11-04

MIYAZAKI Teruo et al. (JP)

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