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Title:
OPTICAL MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/062790
Kind Code:
A1
Abstract:
Provided is an optical measurement device with which it is possible to solve at least one of the abovementioned problems.　A light source device 200 generates wavelength-swept light L1. An irradiation optical system 310 irradiates an object with the wavelength-swept light L1. A pulse light source 210 generates pulse light including a continuous spectrum. A splitter 222 spatially splits the pulse light into a plurality of beams, i.e., n beams (n≥2), according to wavelength. A plurality of fibers FB, i.e., n fibers FB, impart different delays to the n beams. A coupler 226 is a bundle fiber FB or a multi-core fiber that combines the n beams outputted from the n fibers FB. The incidence end of a rod integrator 228 is coupled to the emission end of the coupler 226. A critical illumination system 312 projects a light source image of the emission end of the rod integrator 228 onto an object 2.

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Inventors:
OTA AYA (JP)
WATANABE KATSUYA (JP)
YOKOYAMA TAKUMA (JP)
Application Number:
PCT/JP2023/029016
Publication Date:
March 28, 2024
Filing Date:
August 09, 2023
Export Citation:
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Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G01J3/10; G01J3/433; G02B6/02; G02B6/04; G02F1/365
Domestic Patent References:
WO2009044517A12009-04-09
Foreign References:
JP2008124318A2008-05-29
JP2008122785A2008-05-29
JP2007041239A2007-02-15
JP2003163393A2003-06-06
JP2003059799A2003-02-28
JP2002350914A2002-12-04
JP2003051438A2003-02-21
JP2016027540A2016-02-18
JP2001083472A2001-03-30
US20140204134A12014-07-24
JP2017505555A2017-02-16
JP2020170089A2020-10-15
JP2017527111A2017-09-14
Attorney, Agent or Firm:
KIMURA Masayoshi (JP)
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