OPTICAL MEASUREMENT EVALUATING METHOD AND OPTICAL MEASUREMENT EVALUATING DEVICE

WIPO Patent Application WO/2006/051766

A1

A high-sensitivity optical anisotropy evaluation technique. The optical measurement evaluation device (A) comprises an optical pulse generator for generating an optical pulse (1), a semitransparent mirror (3), a first mirror (5), a second mirror (7), a third mirror (9), a retroreflector (11), a wavelength plate (15), a lens (17), a spectrometer (21), and a controller (PC) (23). An optical pulse (L1) generated from the optical pulse generator (1) is separated by the semitransparent mirror (3) into optical pulses (L2) and (L3). The optical pulse (L2) is reflected by the mirrors (5, 7) (pulse light (L4), (L5)), and the polarization of the optical pulse is rotated by the half wave phase plate (15) arranged on a rotary stage (15a), and the optical pulse is focused onto the surface of a sample (S) by means of the lens (17) (L8). The optical pulse (L3) is reflected (L6) by the retroreflector (11) returning light parallel with the incident light non-coaxially and reflected by the mirror (9), and the polarization of the optical pulse is rotated by the half wave phase plate (15) arranged on the rotary stage (15a), and the optical pulse is focused at the similar position on the sample (S) by means of the lens (17) through an optical path (L7) different from (L8). The sample (S) is irradiated with two linearly polarized optical pulses arranged substantially in parallel and rotated simultaneously. A four light wave mixing phenomenon takes place when the optical pulse (L8) is given a wave number k₁ and the optical pulse (L7) is given a wave number k₂. Significant anisotropy appears in the intensity of diffracted light (2k₂-k₁) when variation in anisotropy due to uniaxial strain exists in an isotropic thin film.

TODA YASUNORI
ADACHI SATORU

PCT/JP2005/020410

May 18, 2006

November 08, 2005

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UNIV HOKKAIDO NAT UNIV CORP (JP)
TODA YASUNORI
ADACHI SATORU

G01N21/21; G01B11/16; G01J3/443; G01J3/447

JPH10115573A	1998-05-06
JP2004061411A	2004-02-26

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Hiraki, Yusuke (3-20 Toranomon 4-chom, Minato-ku Tokyo 01, JP)

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