Title:
OPTICAL MEASURING APPARATUS AND OPTICAL MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/046070
Kind Code:
A1
Abstract:
Provided is an optical measuring technique capable of performing stable measurement with high speed, high sensitivity, and high precision without being affected by intensity changes in output light of a light source and sensitivity changes in a light receiver. An optical measuring apparatus is provided with a light source, a π/2 phase adder that delays a partial optical component of output light of the light source relative to other optical components by π/2, a light receiver that detects light passing through the π/2 phase adder and light guided to a sample and passing through or reflected by the sample, and a phase change detector into which detection light detected by the light receiver and a synchronous signal synchronized with the light source are input and that detects a phase change occurring in the detection light using the synchronous signal. The characteristics of the sample are acquired through the phase change.
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Inventors:
TSUKADA TOSHIAKI (JP)
SETO KEISUKE (JP)
KOBAYASHI TAKAYOSHI (JP)
SETO KEISUKE (JP)
KOBAYASHI TAKAYOSHI (JP)
Application Number:
PCT/JP2014/074890
Publication Date:
April 02, 2015
Filing Date:
September 19, 2014
Export Citation:
Assignee:
UNIV ELECTRO COMMUNICATIONS (JP)
International Classes:
G01N21/41; G01J9/04; G01N21/01
Domestic Patent References:
| WO2012121357A1 | 2012-09-13 | |||
| WO2013084621A1 | 2013-06-13 |
Foreign References:
| JP2011202972A | 2011-10-13 | |||
| JP2012002757A | 2012-01-05 | |||
| JP2004279380A | 2004-10-07 | |||
| JP2005537489A | 2005-12-08 | |||
| JP2007198854A | 2007-08-09 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
Tadashige Ito (JP)
Tadashige Ito (JP)
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