Title:
OPTICAL MEMBER, CHAMBER, AND LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/057233
Kind Code:
A1
Abstract:
An optical member (100) is provided with a substrate (10) and a Cu-proof protective layer (23) formed on the substrate.
Inventors:
MIZUGUCHI MASAFUMI (JP)
Application Number:
PCT/JP2016/078183
Publication Date:
April 06, 2017
Filing Date:
September 26, 2016
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B1/115; G03F7/20; H01S3/034
Domestic Patent References:
| WO2003092081A1 | 2003-11-06 |
Foreign References:
| JP2002526804A | 2002-08-20 | |||
| JP2002311209A | 2002-10-23 | |||
| JP2000314803A | 2000-11-14 | |||
| JP2003313438A | 2003-11-06 | |||
| JPH06250015A | 1994-09-09 | |||
| JPS62123401A | 1987-06-04 | |||
| JPS63113502A | 1988-05-18 | |||
| JPH0529682A | 1993-02-05 | |||
| JP2012219185A | 2012-11-12 |
Other References:
See also references of EP 3358377A4
Attorney, Agent or Firm:
KAWAKITA, Kijuro et al. (JP)
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