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Title:
OPTICAL MEMBER COMPRISING SILICA GLASS CONTAINING TiO2
Document Type and Number:
WIPO Patent Application WO/2010/082586
Kind Code:
A1
Abstract:
An optical member comprising silica glass containing TiO2, the glass having a TiO2 concentration of 3-10 mass%, a Ti3+ concentration of 100 wt. ppm or lower, a coefficient of thermal expansion at 0-100ºC, CTE0-100, of 0±150 ppb/ºC, and an internal transmittance in the wavelength region of 400-700 nm, T400-700, of 80% or higher per mm of the thickness. In the surface to be used for an optical purpose, the proportion of Ti3+ concentration unevenness to average Ti3+ concentration, ΔTi3+/Ti3+, is 0.2 or lower.

Inventors:
KOIKE AKIO (JP)
TAMITSUJI CHIKAYA (JP)
WATANABE KUNIO (JP)
OGAWA TOMONORI (JP)
Application Number:
PCT/JP2010/050286
Publication Date:
July 22, 2010
Filing Date:
January 13, 2010
Export Citation:
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Assignee:
ASAHI GLASS CO LTD (JP)
KOIKE AKIO (JP)
TAMITSUJI CHIKAYA (JP)
WATANABE KUNIO (JP)
OGAWA TOMONORI (JP)
International Classes:
C03C3/06; C03B20/00; G02B1/00; G03F1/24; H01L21/027; G03F1/00
Foreign References:
JP2008505043A2008-02-21
JP2006103988A2006-04-20
JP2006210404A2006-08-10
JP2008100891A2008-05-01
JP2004315351A2004-11-11
US20020157421A12002-10-31
JP2008505043A2008-02-21
JP2005104820A2005-04-21
JP2009004507A2009-01-08
Other References:
See also references of EP 2377826A4
J. P. WILLIAMS ET AL., CERAMIC BULLETIN, vol. 55, no. 5, 1976, pages 524
JOURNAL OF APPLIED PHYSICS, vol. 91, no. 8, 2002, pages 4886
BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, 1972, pages 350
Attorney, Agent or Firm:
OGURI Shohei et al. (JP)
Shohei Oguri (JP)
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