OPTICAL MICROSCOPE AND METHOD OF SPECTROSCOPIC MEASUREMENT

Title:

OPTICAL MICROSCOPE AND METHOD OF SPECTROSCOPIC MEASUREMENT

Document Type and Number:

WIPO Patent Application WO/2019/035483

Kind Code:

A1

Abstract:

An optical microscope (100) according to an aspect of the present invention comprises: a light source (10); a first scanner for scanning a spot position of a light beam on a sample; an objective lens (21) that focuses the light beam deflected by the first scanner and causes the light beam to enter the sample; a spectroscope (31) having a slit on the incidence side where emission light emitted from an area of the sample irradiated with the light beam enters; a detector (32) for detecting the light emitted from the spectroscope (31); and a first relay optical system (300) that is provided on the optical path from the first scanner to the objective lens (21) and includes a first off-axis parabolic mirror (301) for reflecting a light beam deflected by the first scanner and a second off-axis parabolic mirror (302) for reflecting a light beam reflected by the first off-axis parabolic mirror (301).

Inventors:

KOBAYASHI MINORU (JP)
KAWANO SHOGO (JP)
OTA TAISUKE (JP)
MATSUZAKA SHUNICHIRO (JP)
SHIOZAKI YUSUKE (JP)
YAMAUCHI SHOTA (JP)

Application Number:

PCT/JP2018/030499

Publication Date:

February 21, 2019

Filing Date:

August 17, 2018

Export Citation:

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Assignee:

NANOPHOTON CORP (JP)

International Classes:

G02B21/06; G01J3/44; G01N21/65; G02B21/36

Foreign References:

JP2007179002A	2007-07-12
JP2012229936A	2012-11-22
JP2016212197A	2016-12-15
JP2006047780A	2006-02-16
JP2011039542A	2011-02-24
JP2009294159A	2009-12-17
JP2016158708A	2016-09-05
JP2007179002A	2007-07-12
JP2010127726A	2010-06-10
US4997242A	1991-03-05
JP2017157778A	2017-09-07

Other References: