Title:
OPTICAL MIRROR, X-RAY FLUORESCENCE ANALYSIS DEVICE, AND METHOD FOR X-RAY FLUORESCENCE ANALYSIS
Document Type and Number:
WIPO Patent Application WO/2014/135429
Kind Code:
A1
Abstract:
The invention relates to an x-ray fluorescence analysis device, comprising an x-ray source (10) for irradiating a sample (15) with x-radiation (19), an x-ray detector (17) for measuring x-ray fluorescence radiation (16) emitted by the sample (15), and a camera (25) for producing an optical control image (26) of the irradiated measurement point (29) of a sample (15) by means of the optical mirror (20) arranged at an angle in the beam path of the x-ray source (10), which optical mirror comprises a carrier (21) having a mirror layer (28) provided on the carrier (21). In order to create an x-ray florescence device by means of which realistic control recordings of the sample to be analysed, in particular of the sampled surface point, are possible, the invention provides that the optical mirror (20) has a passage window (23) for the x-radiation (19), which is formed by an opening (23) in the carrier (21) and a foil (22) forming the mirror layer (28) and covering the opening (23) on an outer surface of the carrier (21).
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Inventors:
RÖSSIGER VOLKER (DE)
Application Number:
PCT/EP2014/053799
Publication Date:
September 12, 2014
Filing Date:
February 27, 2014
Export Citation:
Assignee:
HELMUT FISCHER GMBH INST FÜR ELEKTRONIK UND MESSTECHNIK (DE)
International Classes:
G01N23/223; G01B15/02
Foreign References:
| US20090190722A1 | 2009-07-30 | |||
| GB2095960A | 1982-10-06 | |||
| US4406015A | 1983-09-20 | |||
| DE3314281A1 | 1984-10-25 | |||
| US20050069092A1 | 2005-03-31 |
Attorney, Agent or Firm:
PATENTANWÄLTE MAMMEL UND MASER (DE)
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