Title:
OPTICAL MODULATOR AND METHOD OF MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2016/125772
Kind Code:
A1
Abstract:
Provided is an optical phase modulator in which optical loss is small, that has a compact size, in which the required voltage is low, and that is capable of high-speed operation. An optical phase modulator 100 according to an embodiment of the present invention is provided with a rib-type waveguide structure 110 including: a p-n junction 106 comprising Si and formed in the lateral direction on a substrate; and a Si1-xGex layer 108 doped with a p-type impurity and comprising at least one layer laminated on the p-n junction 106, so as to be electrically connected to the p-n junction 106.
Inventors:
FUJIKATA JUNICHI (JP)
TAKAHASHI SHIGEKI (JP)
TAKENAKA MITSURU (JP)
KIM YOUNGHYUN (JP)
TAKAHASHI SHIGEKI (JP)
TAKENAKA MITSURU (JP)
KIM YOUNGHYUN (JP)
Application Number:
PCT/JP2016/053001
Publication Date:
August 11, 2016
Filing Date:
February 02, 2016
Export Citation:
Assignee:
PHOTONICS ELECTRONICS TECHNOLOGY RES ASS (JP)
UNIV TOKYO (JP)
UNIV TOKYO (JP)
International Classes:
G02F1/015; G02B6/12; G02B6/122; G02F1/025
Domestic Patent References:
| WO2014155450A1 | 2014-10-02 |
Foreign References:
| JP2012521576A | 2012-09-13 | |||
| JP2011076053A | 2011-04-14 | |||
| JP2013214044A | 2013-10-17 | |||
| US20120189239A1 | 2012-07-26 |
Other References:
J. FUJIKATA ET AL.: "High Performance PIN Ge Photodetector and Si Optical Modulator with MOS Junction for Photonics-Electronics Convergence System", DESIGN AUTOMATION CONFERENCE (ASP-DAC), 2013 18TH ASIA AND SOUTH PACIFIC, 22 January 2013 (2013-01-22), pages 655 - 656, XP032385889
J. FUJIKATA ET AL.: "25 GHz Operation of Silicon Optical Modulator with Projection MOS Structure", OPTICAL FIBER COMMUNICATION (OFC), COLLOCATED NATIONAL FIBER OPTIC ENGINEERS CONFERENCE, 2010 CONFERENCE ON (OFC/NFOEC, 21 March 2010 (2010-03-21), pages 1 - 3, XP008177967
See also references of EP 3255480A4
J. FUJIKATA ET AL.: "25 GHz Operation of Silicon Optical Modulator with Projection MOS Structure", OPTICAL FIBER COMMUNICATION (OFC), COLLOCATED NATIONAL FIBER OPTIC ENGINEERS CONFERENCE, 2010 CONFERENCE ON (OFC/NFOEC, 21 March 2010 (2010-03-21), pages 1 - 3, XP008177967
See also references of EP 3255480A4
Attorney, Agent or Firm:
ONO, Shinjiro et al. (JP)
Ono Shinjiro (JP)
Ono Shinjiro (JP)
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