Title:
OPTICAL MODULATOR AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2019/049681
Kind Code:
A1
Abstract:
The present invention provides a small optical modulator capable of high-speed operation with low light loss and low required voltage. An optical phase modulator 100 is provided with a rib waveguide structure 110 including a PN junction 106 made of Si horizontally formed on a substrate and a Si1-xGex layer 108 having at least one layer, which is doped with a p-type impurity and is laminated on the PN junction 106 to electrically connect the Si1-xGex layer 108 and the PN junction 106. The rib waveguide structure 110 is substantially uniform in the direction light propagates. The position of a junction interface 106a in the PN junction 106 is offset from the center of the Si1-xGex layer 108 in a direction parallel to the substrate and perpendicular to the direction light propagates.
Inventors:
FUJIKATA JUNICHI (JP)
TAKAHASHI SHIGEKI (JP)
TAKENAKA MITSURU (JP)
TAKAHASHI SHIGEKI (JP)
TAKENAKA MITSURU (JP)
Application Number:
PCT/JP2018/031260
Publication Date:
March 14, 2019
Filing Date:
August 24, 2018
Export Citation:
Assignee:
PHOTONICS ELECTRONICS TECHNOLOGY RES ASS (JP)
UNIV TOKYO (JP)
UNIV TOKYO (JP)
International Classes:
G02F1/015; G02F1/025
Domestic Patent References:
| WO2016125772A1 | 2016-08-11 | |||
| WO2013062096A1 | 2013-05-02 |
Foreign References:
| JP2013109170A | 2013-06-06 | |||
| US20120189239A1 | 2012-07-26 |
Attorney, Agent or Firm:
ONO, Shinjiro et al. (JP)
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