Title:
OPTICAL MODULE
Document Type and Number:
WIPO Patent Application WO/2015/049958
Kind Code:
A1
Abstract:
An optical module (1A) is provided with: a semiconductor substrate (2); an electrostatic actuator (10) that has a fixed section (11), which is fixed to the semiconductor substrate (2), and a movable section (12), which is moved with respect to the fixed section (11) by means of an electrostatic force generated between the fixed section (11) and the movable section; a first spring section (20), which is connected to the movable section (12), and which has a first spring constant (K1); a second spring section (30), which is connected between the first spring section (20) and the semiconductor substrate (2), and which has a second spring constant (K2) that is larger than the first spring constant (K1); and a movable mirror (5), which is an optical component connected to a connecting section (13) between the first spring section (20) and the second spring section (30). Consequently, the optical module that is capable of stably and highly accurately operating the optical component using the electrostatic actuator is provided.
Inventors:
WARASHINA YOSHIHISA (JP)
Application Number:
PCT/JP2014/073712
Publication Date:
April 09, 2015
Filing Date:
September 08, 2014
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H02N1/00
Foreign References:
| JP2013522600A | 2013-06-13 | |||
| JP2008256837A | 2008-10-23 | |||
| JPH0240481Y2 | 1990-10-29 | |||
| US20110222067A1 | 2011-09-15 | |||
| JPH0240481A | 1990-02-09 |
Other References:
See also references of EP 3054580A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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