Title:
OPTICAL MODULE
Document Type and Number:
WIPO Patent Application WO/2018/168935
Kind Code:
A1
Abstract:
This optical module is provided with a support layer (2A), a device layer (3A) provided on the support layer (2A), and a movable mirror (5A) mounted in the device layer (3A). The device layer (3A) has a mounting region (31A) through which the movable mirror (5A) passes, and a drive region (32A) which is connected to the mounting region (31A). Between the support layer (2A) and the device layer (3A), a space (S1A) is formed that corresponds to at least the mounting region (31A) and the device region (32A), and part of the movable mirror (5A) is positioned in the space (S1A).
Inventors:
SUZUKI TOMOFUMI (JP)
SUGIMOTO TATSUYA (JP)
KOTANI KYOSUKE (JP)
SUGIMOTO TATSUYA (JP)
KOTANI KYOSUKE (JP)
Application Number:
PCT/JP2018/009992
Publication Date:
September 20, 2018
Filing Date:
March 14, 2018
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
B81B3/00; G02B26/00; G01J3/45; G01N21/35; G02B26/06
Foreign References:
| JP2006102934A | 2006-04-20 | |||
| JP2010286609A | 2010-12-24 | |||
| JP2004082288A | 2004-03-18 | |||
| JP2010184334A | 2010-08-26 | |||
| JP2012524295A | 2012-10-11 | |||
| JP2012240129A | 2012-12-10 | |||
| JP2012242450A | 2012-12-10 | |||
| US20140192365A1 | 2014-07-10 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Download PDF: