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Patent Searching and Data


Title:
OPTICAL MODULE
Document Type and Number:
WIPO Patent Application WO/2019/009391
Kind Code:
A1
Abstract:
This optical module is provided with a mirror unit and a beam splitter unit. The mirror unit is provided with: a base having a main surface; a movable mirror; a first fixed mirror; and a drive unit. The beam splitter unit, the movable mirror, and the first fixed mirror form a first interference optical system for measurement light. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror extend in a plane parallel to the main surface, and face one side in a first direction orthogonal to the main surface. The movable mirror, the drive unit, and at least a portion of the optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.

Inventors:
SUZUKI TOMOFUMI (JP)
KOTANI KYOSUKE (JP)
SUGIMOTO TATSUYA (JP)
Application Number:
PCT/JP2018/025633
Publication Date:
January 10, 2019
Filing Date:
July 06, 2018
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/00; G01B9/02; G01J3/45; G02B7/198
Domestic Patent References:
WO2016166872A12016-10-20
Foreign References:
JP2010170029A2010-08-05
JP2015225153A2015-12-14
JP2012107962A2012-06-07
JP2012524295A2012-10-11
Other References:
See also references of EP 3650913A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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