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Title:
OPTICAL MODULE
Document Type and Number:
WIPO Patent Application WO/2019/009401
Kind Code:
A1
Abstract:
This optical module 1 is provided with: a mirror unit 2 including a base 21, a movable mirror 22, and a fixed mirror 16; a beam splitter unit 3 which is provided to one side of the mirror unit 2 in a Z-axis direction; a light entrance part 4 which causes measurement light L0 to become incident on the beam splitter unit 3; a first photodetector 6 which is provided to the one side of the beam splitter unit 3 in the Z-axis direction, and which detects coherent light L1 of the measurement light emitted from the beam splitter unit 3; a support 9 to which the mirror unit 2 is attached; a first support structure 11 for supporting the beam splitter unit 3; and a second support structure 12 which is attached to the support 9, and which supports the first photodetector 6.

Inventors:
SUZUKI Tomofumi (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
KOTANI Kyosuke (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
SUGIMOTO Tatsuya (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
KURAMOTO Yutaka (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
Application Number:
JP2018/025644
Publication Date:
January 10, 2019
Filing Date:
July 06, 2018
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS K.K. (1126-1, Ichino-cho Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
International Classes:
G01J3/45; G01B9/02; G02B7/198; G02B26/00
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (SOEI PATENT AND LAW FIRM, Marunouchi MY PLAZA 9th fl. 1-1, Marunouchi 2-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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