Title:
OPTICAL PATH COMPENSATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/001412
Kind Code:
A1
Abstract:
An optical path compensation device, comprising a wedge plate group (100), a driving mechanism (200) and a pre-tightening unit, wherein the wedge plate group includes a movable wedge plate (120) and a fixed wedge plate (100); the movable wedge plate has the same wedge angle as the fixed wedge plate and has a wedge surface opposite to that of the fixed wedge plate; the pre-tightening unit elastically presses the movable wedge plate on the fixed wedge plate; and the driving mechanism drives the wedge surface of the movable wedge plate to slide relative to the wedge surface of the fixed wedge plate. The optical path compensation device can effectively implement correction of a position of a focal plane of a focusing and leveling measurement system while avoiding causing other direction errors. The correcting process is smooth; the operation is convenient; and the correcting precision is high.
Inventors:
LI SHURONG (CN)
CHENG HAILIN (CN)
CHENG HAILIN (CN)
Application Number:
PCT/CN2018/092818
Publication Date:
January 03, 2019
Filing Date:
June 26, 2018
Export Citation:
Assignee:
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD (CN)
International Classes:
G03F7/20; G03F9/00
Foreign References:
| CN105445929A | 2016-03-30 | |||
| CN103488062A | 2014-01-01 | |||
| CN205436249U | 2016-08-10 | |||
| CN104806864A | 2015-07-29 | |||
| CN203535534U | 2014-04-09 | |||
| CN204179915U | 2015-02-25 | |||
| JP3933881B2 | 2007-06-20 |
Attorney, Agent or Firm:
SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY (CN)
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