Title:
OPTICAL PRESSURE SENSOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/074112
Kind Code:
A1
Abstract:
In the present invention, the measurement accuracy of an optical pressure sensor is substantially improved.
The optical pressure sensor comprises: a first member; a second member; and an optical transmission medium. The first member and the second member each have a plate-shaped portion. The first member has a lateral wall portion that extends from the plate-shaped portion of the first member and that is joined at a distal end surface to the surface of the plate-shaped portion of the second member. An airtight space is defined by two plate-shaped portions and the lateral wall portion. The optical transmission medium is attached to a surface of one of the two plate-shaped portions on a side opposite an airtight space-side surface. A first reflective film that reflects light transmitted by the optical transmission medium is formed on the surface of the plate-shaped portion of the first member facing the airtight space. The surface of the plate-shaped portion of the second member on the first member side includes a first region facing the airtight space, and a second region facing the distal end surface of the lateral wall portion of the first member. A second reflective film that reflects light transmitted by the optical transmission medium is formed across the entirety of the first region.
Inventors:
HAGA YOICHI (JP)
MATSUNAGA TADAO (JP)
NAKAYAMA TSUYOSHI (JP)
KATOU KENTA (JP)
NAKAMURA KENTA (JP)
MATSUNAGA TADAO (JP)
NAKAYAMA TSUYOSHI (JP)
KATOU KENTA (JP)
NAKAMURA KENTA (JP)
Application Number:
PCT/JP2022/032556
Publication Date:
May 04, 2023
Filing Date:
August 30, 2022
Export Citation:
Assignee:
ASAHI INTECC CO LTD (JP)
International Classes:
G01L11/02; A61B5/0215; G01L9/00; G02B26/00
Foreign References:
JPS61246641A | 1986-11-01 | |||
JP2005291945A | 2005-10-20 | |||
US20090202195A1 | 2009-08-13 | |||
JP2011038915A | 2011-02-24 | |||
US20040263857A1 | 2004-12-30 | |||
JPH0634469A | 1994-02-08 |
Attorney, Agent or Firm:
ALPHA INTERNATIONAL PATENT FIRM (JP)
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