Title:
OPTICAL PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/168688
Kind Code:
A1
Abstract:
Provided is an optical processing device for supplying, to an object being processed, radicals in which an oxygen-atom-containing organic compound that serves as a raw-material gas is activated using ultraviolet light, and modifying the surface of the object being processed. This optical processing device comprises: a gas generator that generates a mixed gas in which a carrier gas and a raw-material gas including an organic compound that has oxygen atoms and nitrogen atoms are mixed in a desired mixture ratio; a chamber in the interior of which an object being processed can be disposed, the chamber being communicably connected to the gas generator such that the mixed gas can be supplied into the interior of the chamber; and a light source that irradiates the raw-material gas with ultraviolet light exhibiting intensity at least in the wavelength band including wavelengths of 205 nm or lower. The optical processing device modifies the surface of the object being processed using the raw-material gas that has been irradiated with the ultraviolet light.
Inventors:
SHIMAMOTO AKIHIRO (JP)
Application Number:
PCT/JP2022/002800
Publication Date:
August 11, 2022
Filing Date:
January 26, 2022
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
B01J19/08; C08J7/12
Domestic Patent References:
| WO2022024882A1 | 2022-02-03 |
Foreign References:
| JP2015032757A | 2015-02-16 | |||
| JP2003338500A | 2003-11-28 | |||
| JP2016145416A | 2016-08-12 | |||
| JP2012161751A | 2012-08-30 | |||
| JP2017176994A | 2017-10-05 | |||
| JP2011021091A | 2011-02-03 | |||
| JPH0922895A | 1997-01-21 |
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
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