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Title:
OPTICAL PULSE STRETCHER, LASER APPARATUS, AND ELECTRONIC DEVICE PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/229823
Kind Code:
A1
Abstract:
This optical pulse stretcher is provided with: a separation optical element which separates a pulse laser beam entering a first surface into first transmitted light and first reflected light; a reflective optics system which guides and causes the first reflected light to enter a second surface opposite to the first surface of the separation optical element; and a holding member which has a through-hole having an opening area smaller than the area of a reflective surface of a reflection optical element in the reflective optics system and which is disposed on the rear surface side of the reflection optical element so as to hold the reflection optical element.

Inventors:
ASHIKAWA Koji (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
Application Number:
JP2018/020423
Publication Date:
December 05, 2019
Filing Date:
May 28, 2018
Export Citation:
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Assignee:
GIGAPHOTON INC. (400 Oaza Yokokurashinden, Oyama-shi Tochigi, 58, 〒3238558, JP)
International Classes:
H01S3/10
Domestic Patent References:
WO2015092855A12015-06-25
WO2015151152A12015-10-08
WO2016151827A12016-09-29
Foreign References:
JP2001091713A2001-04-06
JPH11213387A1999-08-06
JP2003078189A2003-03-14
JPH0810978A1996-01-16
JP2005148549A2005-06-09
JPH10341090A1998-12-22
US20060216037A12006-09-28
Attorney, Agent or Firm:
HOSAKA Nobuhisa (ARAI, HASHIMOTO HOSAKA & ASSOCIATES, KANDA SK BLDG. 4F, 3-22, KANDA SAKUMA-CHO, CHIYODA-K, Tokyo 25, 〒1010025, JP)
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