Title:
OPTICAL REFLECTION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2010/058565
Kind Code:
A1
Abstract:
Provided is an optical reflection element including a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes: a base, an insulation layer formed on the base; a drive element and a monitor element which are formed separately from each other by a separating groove on the insulation layer. Each of the drive element and the monitor element is formed on the insulation layer by successively layering a lower electrode layer, a piezoelectric layer, and an upper electrode layer. This improves the detection accuracy of the monitor element and realizes self-excited driving of the optical reflection element with a high accuracy.
Inventors:
HIRAOKA SOICHIRO
TERADA JIROU
NAKAZONO SHINSUKE
FURUKAWA SHIGEO
TERADA JIROU
NAKAZONO SHINSUKE
FURUKAWA SHIGEO
Application Number:
PCT/JP2009/006190
Publication Date:
May 27, 2010
Filing Date:
November 18, 2009
Export Citation:
Assignee:
PANASONIC CORP (JP)
HIRAOKA SOICHIRO
TERADA JIROU
NAKAZONO SHINSUKE
FURUKAWA SHIGEO
HIRAOKA SOICHIRO
TERADA JIROU
NAKAZONO SHINSUKE
FURUKAWA SHIGEO
International Classes:
G02B26/10; G02B5/08; G02B26/08
Foreign References:
| JP2008040240A | 2008-02-21 | |||
| JP2006293116A | 2006-10-26 | |||
| JP2006320089A | 2006-11-24 | |||
| JP2008040240A | 2008-02-21 |
Other References:
MASANAO TANI ET AL.: "Atsuden MEMS Hikari Scanner ni yoru Gazo Display", THE REVIEW OF LASER ENGINEERING, vol. 36, no. 4, 15 April 2008 (2008-04-15), pages 183 - 189, XP008146919
See also references of EP 2352050A4
See also references of EP 2352050A4
Attorney, Agent or Firm:
NAITO, Hiroki et al. (JP)
Hiroki Naito (JP)
Hiroki Naito (JP)
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