Title:
OPTICAL REFLECTIVE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2023/181675
Kind Code:
A1
Abstract:
An optical reflection element (1) comprises: a moving part (40) on which a mirror (70) is formed; a fixed part (10) which supports the moving part (40); meandering-type vibration plates (21-24) which are disposed between the moving part (40) and the fixed part (10); a connecting beam (35) which connects the vibration plates (21-24) and the moving part (40); driving parts (50, 60) which are disposed to the vibration plates (21-24) and which rotate the moving part (40) about a rotation axis (R10); and a stopper (81) which is disposed adjacently to the connecting beam (35) in a direction parallel to the rotation axis (R10) and which limits displacement of at least the vibration plates (21-24).
Inventors:
TAKIGAWA JUN
MIHARA KENSUKE
MIHARA KENSUKE
Application Number:
PCT/JP2023/003969
Publication Date:
September 28, 2023
Filing Date:
February 07, 2023
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G02B26/10; B81B3/00; G02B26/08
Foreign References:
| JP2010197662A | 2010-09-09 | |||
| JP2015102671A | 2015-06-04 | |||
| JP2007152497A | 2007-06-21 | |||
| JP2016143020A | 2016-08-08 | |||
| JP2005266074A | 2005-09-29 |
Attorney, Agent or Firm:
SHIBANO, Masanori et al. (JP)
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