Title:
OPTICAL SCANNING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/053840
Kind Code:
A1
Abstract:
This optical scanning device comprises: a micromirror device having a mirror part that has a reflection surface for reflecting incident light, a first actuator that oscillates the mirror part around a first axis parallel to the reflection surface when the mirror part is standing still, and a second actuator that oscillates the mirror part around a second axis parallel to the reflection surface and orthogonal to the first axis; a light source that emits an optical beam; an optical deflector that deflects the optical beam emitted from the light source; an optical system that guides the optical beam deflected by the optical deflector to a back surface that is a surface on the reverse side from the reflection surface of the mirror part; and a position detector that detects the position of the optical beam deflected by the back surface.
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Inventors:
NISHIURA YOSUKE (JP)
NAKABAYASHI KOKI (JP)
NAKABAYASHI KOKI (JP)
Application Number:
PCT/JP2022/033041
Publication Date:
April 06, 2023
Filing Date:
September 01, 2022
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G02B26/10; B81B3/00; G02B26/08
Domestic Patent References:
| WO2019176204A1 | 2019-09-19 |
Foreign References:
| JP2002148536A | 2002-05-22 | |||
| US20120236379A1 | 2012-09-20 | |||
| JP2019074375A | 2019-05-16 | |||
| JP2017173622A | 2017-09-28 | |||
| JP2013179085A | 2013-09-09 | |||
| JPS59133519A | 1984-07-31 | |||
| JP2019020698A | 2019-02-07 | |||
| JPH03288120A | 1991-12-18 | |||
| JP2011112744A | 2011-06-09 | |||
| JP2008116678A | 2008-05-22 | |||
| JP2012198511A | 2012-10-18 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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