Title:
OPTICAL SENSOR, OPTICAL SENSING SYSTEM, AND METHOD FOR MANUFACTURING OPTICAL SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/062999
Kind Code:
A1
Abstract:
Provided are an optical sensor, an optical sensing system, and a method for manufacturing an optical sensor. The optical sensor comprises a substrate (201), a patterned light-shielding layer (205) located on the substrate, a transparent dielectric layer (210) located on the patterned light-shielding layer and covering sensing pixels (203), and a light guide layer (214) arranged on the transparent dielectric layer, wherein the substrate comprises a plurality of sensing pixels; the patterned light-shielding layer is formed by irradiating a photomask (30) onto a light-shielding material layer (2050) through an excimer laser light source (40), and the patterned light-shielding layer includes a plurality of through holes (207), with the positions of the plurality of through holes corresponding to the positions of the sensing pixels and exposing the sensing pixels; and the light guide layer, which is arranged on the transparent dielectric layer, comprises a plurality of light guide members corresponding to the plurality of through holes, and the plurality of light guide members guide incident light to penetrate through the transparent dielectric layer to reach the sensing pixels exposed by the plurality of through holes.
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Inventors:
TU CHIH-CHUNG (CN)
Application Number:
PCT/CN2020/087524
Publication Date:
April 08, 2021
Filing Date:
April 28, 2020
Export Citation:
Assignee:
EGIS TECH INC (CN)
International Classes:
G06K9/00; H01L27/146
Foreign References:
| TW201837565A | 2018-10-16 | |||
| CN103376650A | 2013-10-30 | |||
| CN209282203U | 2019-08-20 | |||
| KR20090068934A | 2009-06-29 |
Attorney, Agent or Firm:
LUNG TIN INTELLECTUAL PROPERTY AGENT LTD. (CN)
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