Title:
OPTICAL SENSOR
Document Type and Number:
WIPO Patent Application WO/2010/079686
Kind Code:
A1
Abstract:
Disclosed is an infrared sensor (1) comprising a bolometer element (11) and a reference element (21), wherein the reference element (21) comprises a bolometer film (22), a substrate-side insulating film (31) which is formed on the substrate-side surface of the bolometer film (22), a heat dissipation film (23) which is composed of amorphous silicon and formed on the substrate-side surface of the bolometer film (22) with the substrate-side insulating film (31) interposed therebetween, and a plurality of heat dissipation columns (25) which are composed of amorphous silicon and thermally connected with the heat dissipation film (23) and a substrate (10). The bolometer film (22) and the substrate-side insulating film (31) are so formed as to stretch out to and cover the lateral surface of the heat dissipation film (23), said lateral surface meeting with the surface of the substrate (10). The infrared sensor (1) can be reduced in size, while efficiently reducing the effect of temperature changes in the environment where the infrared sensor (1) is used.
Inventors:
SUZUKI Jun (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
鈴木 順 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
OJIMA Fumikazu (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
鈴木 順 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
OJIMA Fumikazu (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
Application Number:
JP2009/071316
Publication Date:
July 15, 2010
Filing Date:
December 22, 2009
Export Citation:
Assignee:
HAMAMATSU PHOTONICS K.K. (1126-1, Ichino-cho Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
浜松ホトニクス株式会社 (〒58 静岡県浜松市東区市野町１１２６番地の１ Shizuoka, 〒4358558, JP)
SUZUKI Jun (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
鈴木 順 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
浜松ホトニクス株式会社 (〒58 静岡県浜松市東区市野町１１２６番地の１ Shizuoka, 〒4358558, JP)
SUZUKI Jun (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
鈴木 順 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
International Classes:
G01J1/02; G01J1/42; H01L27/14; H01L37/00
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (SOEI PATENT AND LAW FIRM, Ginza First Bldg. 10-6, Ginza 1-chome, Chuo-k, Tokyo 61, 〒1040061, JP)
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