Title:
OPTICAL WAVEGUIDE, OPTICAL CONCENTRATION MEASURING DEVICE, METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE
Document Type and Number:
WIPO Patent Application WO/2018/179752
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide an optical waveguide, an optical concentration measuring device, and a method for manufacturing the optical waveguide, with which improvements in evanescent wave exuding efficiency of propagating light and light extraction efficiency can be achieved. According to the present invention, a core layer (11) provided in an optical waveguide (10) has: a first portion (11a) having a first film thickness; a second portion (11b) having a second film thickness different from the first film thickness; and a third portion (11c) connected between the first portion (11a) and the second portion (11b). The third portion (11c) is formed such that the film thickness of the third portion gradually increases going from the second portion (11b), having the smaller film thickness among the first portion (11a) and the second portion (11b), toward the first portion (11a), having the larger film thickness among the first portion (11a) and the second portion (11b), so that the maximum inclination angle is 10-45° inclusive.
Inventors:
SAKAMOTO TOSHIRO (JP)
FURUYA TAKAAKI (JP)
FURUYA TAKAAKI (JP)
Application Number:
PCT/JP2018/002281
Publication Date:
October 04, 2018
Filing Date:
January 25, 2018
Export Citation:
Assignee:
ASAHI KASEI MICRODEVICES CORP (JP)
International Classes:
G02B6/122; G01N21/552; G02B6/00; G02B6/132
Domestic Patent References:
| WO2008066160A1 | 2008-06-05 | |||
| WO2008111447A1 | 2008-09-18 |
Foreign References:
| JP2015084081A | 2015-04-30 | |||
| JP2011197453A | 2011-10-06 | |||
| JP2005300212A | 2005-10-27 | |||
| US20150309261A1 | 2015-10-29 | |||
| JP2005070557A | 2005-03-17 | |||
| JP2006171078A | 2006-06-29 | |||
| JP2006508398A | 2006-03-09 | |||
| JP2001135887A | 2001-05-18 |
Other References:
EMMONS, R. ET AL.: "Buried-Oxide Silicon-on- Insulator Structures II: Waveguide Grating Couplers", IEEE JOURNAL OF QUANTUM ELECTRONICS, vol. 28, no. 1, January 1992 (1992-01-01), pages 164 - 175, XP055542308
HATTASAN ET AL.: "High-Efficiency SOI Fiber-to-Chip Grating Couplers and Low-Loss Waveguides for the Short-Wave Infrared", IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 24, no. 17, 1 September 2012 (2012-09-01), pages 1536 - 1538, XP055542311
HATTASAN ET AL.: "High-Efficiency SOI Fiber-to-Chip Grating Couplers and Low-Loss Waveguides for the Short-Wave Infrared", IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 24, no. 17, 1 September 2012 (2012-09-01), pages 1536 - 1538, XP055542311
Attorney, Agent or Firm:
MORI Tetsuya et al. (JP)
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