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Title:
ORGANIC COMPOUND FOR CVD RAW MATERIAL AND PROCESS FOR PRODUCING THIN FILM OF METAL OR METAL COMPOUND WITH THE USE OF ORGANIC COMPOUND
Document Type and Number:
WIPO Patent Application WO/2004/024980
Kind Code:
A1
Abstract:
An organic compound for CVD raw material, comprising a first organometallic compound having a metal atom coordinating with ligands and, mixed therewith, at least one second organometallic compound comprising as a center atom the same metal atom as in the first organometallic compound, the center atom coordinating with different ligands, which second organometallic compound exhibits decomposition behavior different from that of the fist organometallic compound. In particular, raw material for CVD realizing characteristics of handling easiness and thin film adherence whose simultaneous achievement has been difficult can be produced by selecting a cyclopentadiene complex or derivative thereof as the first organometallic compound and selecting a β-diketonate compound as the second organometallic compound and by mixing these.

Inventors:
Saito, Masayuki c/o Tanaka, Kikinzoku Kogyo Technical Center K. K. (2-73 Shin-mach, Hiratsuka-shi Kanagawa, 254-0076, JP)
Application Number:
PCT/JP2003/009861
Publication Date:
March 25, 2004
Filing Date:
August 04, 2003
Export Citation:
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Assignee:
TANAKA KIKINZOKU KOGYO K.K. (6-6 Nihonbashikayabacho 2-chome, Chuo-ku, Tokyo, 103-8206, JP)
Saito, Masayuki c/o Tanaka, Kikinzoku Kogyo Technical Center K. K. (2-73 Shin-mach, Hiratsuka-shi Kanagawa, 254-0076, JP)
International Classes:
C07C49/92; C07F1/10; C07F1/12; C07F15/00; C07F17/00; C07F17/02; C23C16/18; C23C16/448; (IPC1-7): C23C16/18; C07C49/92
Domestic Patent References:
WO1998000432A1
Foreign References:
JPH10324970A
Attorney, Agent or Firm:
Tanaka, Daisuke (No.1 Misawa Bldg, 15-2 Hongo 1-chom, Bunkyo-ku Tokyo, 113-0033, JP)
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