Title:
ORGANIC ELECTROLUMINESCENCE DEVICE MANUFACTURING METHOD AND MANUFACTURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/061845
Kind Code:
A1
Abstract:
Provided are an organic electroluminescence device manufacturing method and manufacturing apparatus with which it is possible to manufacture an organic electroluminescence device in which quality deterioration is alleviated. An organic electroluminescence device manufacturing method, which forms an organic electroluminescence element configuration layer on a band-shaped substrate by deposition while moving the substrate in a longitudinal direction, comprises a configuration layer forming step of carrying out, while moving the substrate in the longitudinal direction, a sequential deposition by discharging a gaseous material from a deposition source on one surface of the substrate in an upward deposition part and a lateral deposition part which are disposed along the movement direction of the substrate. The configuration layer forming step is provided with an upward deposition step, a lateral deposition step, and a direction change step.
Inventors:
KAKIUCHI RYOHEI (JP)
YAMAMOTO SATORU (JP)
HIDA KANAKO (JP)
YAMAMOTO SATORU (JP)
HIDA KANAKO (JP)
Application Number:
PCT/JP2012/076848
Publication Date:
May 02, 2013
Filing Date:
October 17, 2012
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H05B33/10; C23C14/56; H01L51/50
Domestic Patent References:
| WO2010090504A2 | 2010-08-12 |
Foreign References:
| JP2008287996A | 2008-11-27 | |||
| JP2006249471A | 2006-09-21 | |||
| JP2008287996A | 2008-11-27 |
Other References:
See also references of EP 2773165A4
Attorney, Agent or Firm:
FUJIMOTO, NOBORU (JP)
Noboru Fujimoto (JP)
Noboru Fujimoto (JP)
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Claims: