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Patent Searching and Data


Title:
ORGANIC FILM FORMATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/117250
Kind Code:
A1
Abstract:
This organic film formation device according to one embodiment is provided with: a chamber in which an atmosphere that has been depressurized to below atmospheric pressure can be maintained; at least one treatment compartment that is provided to the interior of the chamber and is enclosed by a cover; and an exhaust unit that makes it possible to exhaust air out of the interior of the chamber. Provided to the treatment compartment are: an upper heating unit having at least one first heater; a lower heating unit that has at least one second heater and stands opposite the upper heating unit; and a workpiece support section that can support, between the upper heating unit and the lower heating unit, a workpiece that comprises a substrate and a solution that contains organic material and a solvent and that has been applied to an upper surface of the substrate. The treatment compartment comprises a space communicated with the chamber. The exhaust unit depressurizes the interior of the chamber, and also depressurizes a space between an inner wall of the chamber and the cover.

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Inventors:
NISHIBE, Yukinobu (5-1 Kasama 2-chome, Sakae-ku, Yokohama-sh, Kanagawa 10, 〒2478610, JP)
ISO, Akinori (5-1 Kasama 2-chome, Sakae-ku, Yokohama-sh, Kanagawa 10, 〒2478610, JP)
OOMORI, Keigo (5-1 Kasama 2-chome, Sakae-ku, Yokohama-sh, Kanagawa 10, 〒2478610, JP)
TAKAHASHI, Takashi (5-1 Kasama 2-chome, Sakae-ku, Yokohama-sh, Kanagawa 10, 〒2478610, JP)
Application Number:
JP2018/045879
Publication Date:
June 20, 2019
Filing Date:
December 13, 2018
Export Citation:
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Assignee:
SHIBAURA MECHATRONICS CORPORATION (5-1 Kasama 2-chome, Sakae-ku Yokohama-sh, Kanagawa 10, 〒2478610, JP)
International Classes:
F26B9/06; F26B3/30; F26B25/10; F27B17/00; F27D7/06; G02F1/13; G02F1/1337
Foreign References:
JP2017083140A2017-05-18
JP2016223733A2016-12-28
JP2001118852A2001-04-27
JPH01154515A1989-06-16
JP2002195755A2002-07-10
JPS6280199U1987-05-22
Attorney, Agent or Firm:
HYUGAJI, Masahiko et al. (Nisseki Yokohama Bldg, 1-8 Sakuragicho 1-chome, Naka-ku, Yokohama-sh, Kanagawa 66, 〒2318966, JP)
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