Title:
ORGANIC MOLECULE DETECTION ELEMENT AND ORGANIC MOLECULE DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2004/038398
Kind Code:
A1
Abstract:
An element used for detecting organic molecules, which can improve a work efficiency, downsize and simplify a detection device, and improve a detection sensitivity. The element comprises a pair of electrode areas (21, 22) provided on the main surface of a semiconductor substrate (11), insulation films (12, 13) formed on the main surface of the semiconductor substrate, a metal film (17) formed via insulation films so as to cover a specified area (11a) on the main surface side and between electrode areas, and an area (19) disposed on the surface of the metal film to fix organic molecules. A current route is formed in the specified area (11a) according to the electrification amount of those organic molecules that have been fixed in at least the fixing area (19).
Inventors:
YAGI TAKESHI (JP)
Application Number:
PCT/JP2003/013133
Publication Date:
May 06, 2004
Filing Date:
October 14, 2003
Export Citation:
Assignee:
NIKON CORP (JP)
YAGI TAKESHI (JP)
YAGI TAKESHI (JP)
International Classes:
G01N27/60; G01N27/414; G01N33/483; G01N33/53; G01N33/566; G01N37/00; (IPC1-7): G01N27/414
Domestic Patent References:
| WO1998008082A1 | 1998-02-26 | |||
| WO2001064945A2 | 2001-09-07 | |||
| WO1997039145A1 | 1997-10-23 |
Foreign References:
| US5140393A | 1992-08-18 | |||
| JPS55117955A | 1980-09-10 | |||
| JPS57104851A | 1982-06-30 | |||
| JPH08278281A | 1996-10-22 | |||
| US4777019A | 1988-10-11 | |||
| US5074977A | 1991-12-24 | |||
| US20010017265A1 | 2001-08-30 | |||
| US5466348A | 1995-11-14 |
Attorney, Agent or Firm:
Furuya, Fumio (19-5 Nishishinjuku 1-Chom, Shinjuku-ku Tokyo, JP)
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