Title:
ORGANIC THIN FILM DEPOSITING METHOD AND ORGANIC THIN FILM DEPOSITING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/099929
Kind Code:
A1
Abstract:
Provided is an organic thin film depositing method by which accuracy of aligning
a carrier with a substrate can be improved. An organic thin film depositing apparatus
is also provided. In the organic thin film forming apparatus, substrates (4)
carried into a vacuum chamber (2) are held by removable pallets (9), and while
successively transferring the substrates (4), organic thin films are formed
by deposition on the substrates. A transferring return section (15) is provided
between a substrate taking out position (2b) and a deposition start position
(2c) in the vacuum chamber (2), for transferring the pallet (9) separated from
the substrate (4) after deposition, to the deposition start position (2c) through
an upper section of a deposition area (11). The substrate carry-in position (2a)
in the vacuum chamber (2) is provided with the substrate (4), a mask (6) for forming
a deposition pattern, and an aligning mechanism (8) for aligning the pallet (9)
from the vertical direction.
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Inventors:
NEGISHI TOSHIO (JP)
HANE KOJI (JP)
HANE KOJI (JP)
Application Number:
PCT/JP2007/053579
Publication Date:
September 07, 2007
Filing Date:
February 27, 2007
Export Citation:
Assignee:
ULVAC INC (JP)
NEGISHI TOSHIO (JP)
HANE KOJI (JP)
NEGISHI TOSHIO (JP)
HANE KOJI (JP)
International Classes:
C23C14/56; C23C14/12; H01L51/50; H05B33/10
Foreign References:
| JP2005085605A | 2005-03-31 | |||
| JPH09279341A | 1997-10-28 | |||
| JP2005056673A | 2005-03-03 | |||
| JP2004292863A | 2004-10-21 |
Attorney, Agent or Firm:
ABE, Hideki et al. (3F 1-2-18, Toranomon, Minato-k, Tokyo 01, JP)
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