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Patent Searching and Data


Title:
ORGANOAMINO-POLYSILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS
Document Type and Number:
WIPO Patent Application WO/2018/148201
Kind Code:
A8
Abstract:
Organoamino-polysiloxanes, which have at least three silicon atoms, oxygen atoms, as well as an organoamino group, and methods for making the organoamino-polysiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-polysiloxanes are also disclosed.

Inventors:
LEI XINJIAN (US)
XIAO MANCHAO (US)
MACDONALD MATTHEW (US)
SPENCE DANIEL (US)
WANG MEILIANG (US)
RAJARAMAN SURESH (US)
Application Number:
US2018/017050
Publication Date:
August 01, 2019
Filing Date:
February 06, 2018
Export Citation:
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Assignee:
VERSUM MAT US LLC (US)
International Classes:
C23C16/40; C07F7/10; C23C16/455; C23C16/50; H01L21/02
Attorney, Agent or Firm:
ROSSI, Joseph, D. et al. (US)
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