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Title:
ORGANOAMINO-POLYSILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS
Document Type and Number:
WIPO Patent Application WO/2018/148201
Kind Code:
A8
Abstract:
Organoamino-polysiloxanes, which have at least three silicon atoms, oxygen atoms, as well as an organoamino group, and methods for making the organoamino-polysiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-polysiloxanes are also disclosed.

Inventors:
LEI, Xinjian (1928 Cherrywood Street, Vista, CA, 92081, US)
XIAO, Manchao (5534 Caballos Place, San Diego, CA, 92130, US)
MACDONALD, Matthew, R. (27 Firenze Street, Laguna Niguel, CA, 92677, US)
SPENCE, Daniel, P. (2334 Hosp Way, #311Carlsbad, CA, 92008, US)
WANG, Meiliang (363 Avenida La Cuesta, San Marcos, CA, 92078, US)
RAJARAMAN, Suresh, Kalpatu (1640 Windemere Drive, San Marcos, CA, 92078, US)
Application Number:
US2018/017050
Publication Date:
August 01, 2019
Filing Date:
February 06, 2018
Export Citation:
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Assignee:
VERSUM MATERIALS US, LLC (8555 S. River Parkway, Tempe, AZ, 85284, US)
International Classes:
C23C16/40; C07F7/10; C23C16/455; C23C16/50; H01L21/02
Attorney, Agent or Firm:
ROSSI, Joseph, D. et al. (Stradley Ronon Stevens & Young, LLP30 Valley Corporate Cente, Malvern PA, 19355, US)
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