Title:
ORGANOMETALLIC COMPOUND AND PRODUCTION METHOD THEREOF, AND THIN FILM USING SAME AND PRODUCTION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2018/155837
Kind Code:
A1
Abstract:
An organometallic compound and a production method thereof, and a thin film using the same and a production method thereof according to the present invention can increase a thin film deposition rate, decrease contamination in the process, and can be used in a wide temperature range. In addition, the present invention can remarkably improve reliability and efficiency of the manufacturing process.
Inventors:
BYUN YOUNG HUN (KR)
KIM HO HOON (KR)
KIM JEUM JONG (KR)
BAE WOO RI (KR)
LEE YUN SIK (KR)
SHIN SU JUNG (KR)
KANG EUN YOUNG (KR)
KIM HO HOON (KR)
KIM JEUM JONG (KR)
BAE WOO RI (KR)
LEE YUN SIK (KR)
SHIN SU JUNG (KR)
KANG EUN YOUNG (KR)
Application Number:
PCT/KR2018/001486
Publication Date:
August 30, 2018
Filing Date:
February 05, 2018
Export Citation:
Assignee:
MECARO CO LTD (KR)
International Classes:
C07F7/00; C23C16/18; C23C16/455; H01L21/02; H01L21/285
Foreign References:
| KR101263454B1 | 2013-11-27 | |||
| KR20100016477A | 2010-02-12 | |||
| KR20150105747A | 2015-09-18 | |||
| KR20080101040A | 2008-11-21 |
Other References:
JUNG, J. ET AL.: "Atomic Layer Deposition of ZrO2 Thin Film on Si(100) Using { eta5:eta1-C ( CH 2)3NMe}Zr(NMe2)2/03 as Precursors", THIN SOLID FILMS, vol. 589, 2015, pages 831 - 837, XP055473990
PATHAK, A. K. ET AL.: "Studies on Some Coordination Complexes of Bis (cyclopentadienyl)titatinum(IV) Dichloride and Bis(cyclopentadienyl)zirconium(IV) Dichloride", JOURNAL OF THE INDIAN CHEMICAL SOCIETY, vol. 73, no. 6, 1996, pages 227 - 232, XP055551345
PATHAK, A. K. ET AL.: "Studies on Some Coordination Complexes of Bis (cyclopentadienyl)titatinum(IV) Dichloride and Bis(cyclopentadienyl)zirconium(IV) Dichloride", JOURNAL OF THE INDIAN CHEMICAL SOCIETY, vol. 73, no. 6, 1996, pages 227 - 232, XP055551345
Attorney, Agent or Firm:
ERUUM & LEEON INTELLECTUAL PROPERTY LAW FIRM (KR)
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