Title:
ORGANOSILICON NANOCLUSTER AND PROCESS FOR PRODUCING THE SAME
Document Type and Number:
WIPO Patent Application WO/1998/058936
Kind Code:
A1
Abstract:
An organosilicon nanocluster; a method of synthesizing the same; thin silicon and silicon oxide films comprising the same; and a high-performance semiconductor device containing these. This organosilicon nanocluster is soluble in an organic solvent and has a band gap of from 3 to 1.2 eV as determined from T¿auc? plots for the solution.
Inventors:
MIWA TAKAO (JP)
WATANABE AKIRA (JP)
ITOU OSAMU (JP)
SUZUKI MASAO (JP)
WATANABE AKIRA (JP)
ITOU OSAMU (JP)
SUZUKI MASAO (JP)
Application Number:
PCT/JP1998/001382
Publication Date:
December 30, 1998
Filing Date:
March 27, 1998
Export Citation:
Assignee:
HITACHI LTD (JP)
MIWA TAKAO (JP)
WATANABE AKIRA (JP)
ITO OSAMU (JP)
SUZUKI MASAO (JP)
MIWA TAKAO (JP)
WATANABE AKIRA (JP)
ITO OSAMU (JP)
SUZUKI MASAO (JP)
International Classes:
H01L21/20; H01L21/312; H01L21/316; H01L51/30; G02B6/12; (IPC1-7): C07F7/08; H01L21/208; H01L21/316; G02B6/12
Foreign References:
| JPH0873472A | 1996-03-19 | |||
| JPS6368590A | 1988-03-28 | |||
| JPH0849088A | 1996-02-20 | |||
| JPH04264131A | 1992-09-18 | |||
| JPH0853471A | 1996-02-27 | |||
| JPH03123785A | 1991-05-27 |
Other References:
TAKAGI H., ET AL.: "QUANTUM SIZE EFFECTS ON PHOTOLUMINESCENCE IN ULTRAFINE SI PARTICLES", APPLIED PHYSICS LETTERS, A I P PUBLISHING LLC, US, vol. 54., no. 24., 1 January 1990 (1990-01-01), US, pages 2379/2380., XP002911731, ISSN: 0003-6951, DOI: 10.1063/1.102921
ZHANG D., ET AL.: "LIGHT EMISSION FROM THERMALLY OXIDIZED SILICON NANOPARTICLES.", APPLIED PHYSICS LETTERS, A I P PUBLISHING LLC, US, vol. 65., no. 21., 1 January 1994 (1994-01-01), US, pages 2684 - 2686., XP002911732, ISSN: 0003-6951, DOI: 10.1063/1.112602
See also references of EP 1000949A4
ZHANG D., ET AL.: "LIGHT EMISSION FROM THERMALLY OXIDIZED SILICON NANOPARTICLES.", APPLIED PHYSICS LETTERS, A I P PUBLISHING LLC, US, vol. 65., no. 21., 1 January 1994 (1994-01-01), US, pages 2684 - 2686., XP002911732, ISSN: 0003-6951, DOI: 10.1063/1.112602
See also references of EP 1000949A4
Attorney, Agent or Firm:
Takada, Yukihiko (Saiwai-cho 2-chome Hitachi-shi, Ibaraki, JP)
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