Title:
ORIENTED SUBSTRATE FOR USE IN FORMATION OF EPITAXIAL FILM, AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2015/016098
Kind Code:
A1
Abstract:
The present invention is an oriented substrate for use in the formation of an epitaxial film, which has an oriented metal layer formed on at least one surface thereof, said oriented substrate being characterized in that the oriented metal layer comprises a copper layer having a cube texture, palladium is adhered on the surface of the oriented metal layer in an amount of 10 to 300 ng/mm2 per unit area of the surface, and the hydrogen content in the surface of the oriented metal layer is 700 to 2000 ppm. The oriented substrate is produced through a step of adhering palladium on the surface of a copper layer having a cube texture in an amount of 10 to 300 ng/mm2 per unit area of the surface by a strike plating method.
Inventors:
KASHIMA NAOJI (JP)
WATANABE TOMONORI (JP)
NAGAYA SHIGEO (JP)
SHIMA KUNIHIRO (JP)
KUBOTA SHUICHI (JP)
SUGANUMA RYOSUKE (JP)
WATANABE TOMONORI (JP)
NAGAYA SHIGEO (JP)
SHIMA KUNIHIRO (JP)
KUBOTA SHUICHI (JP)
SUGANUMA RYOSUKE (JP)
Application Number:
PCT/JP2014/069318
Publication Date:
February 05, 2015
Filing Date:
July 22, 2014
Export Citation:
Assignee:
TANAKA PRECIOUS METAL IND (JP)
International Classes:
C30B29/22; H01B12/06; H01B13/00
Foreign References:
| JP2006526070A | 2006-11-16 | |||
| JP2002251720A | 2002-09-06 | |||
| JP2008266686A | 2008-11-06 | |||
| JP2009046734A | 2009-03-05 |
Other References:
SHINGO YASUDA ET AL.: "Correlation Between Cu Orientation and Pd Deposition", PROCEEDINGS OF THE 71ST SYMPOSIUM ON SEMICONDUCTORS AND INTEGRATED CIRCUITS TECHNOLOGY, 12 July 2007 (2007-07-12), pages 111 - 113, XP008182357
FUKUMOTO,Y. ET AL.: "Pulsed current electrodeposition of palladium", METAL FINISHING, vol. 82, no. 9, September 1984 (1984-09-01), pages 77 - 80, XP008182067
MIHO YAMAUCHI ET AL.: "Pd Nano Ryushi no Suiso Kyuzo Tokusei", KYUSHU DAIGAKU TEION CENTER DAYORI, March 2007 (2007-03-01), pages 3 - 7, XP008182423
See also references of EP 3029181A4
FUKUMOTO,Y. ET AL.: "Pulsed current electrodeposition of palladium", METAL FINISHING, vol. 82, no. 9, September 1984 (1984-09-01), pages 77 - 80, XP008182067
MIHO YAMAUCHI ET AL.: "Pd Nano Ryushi no Suiso Kyuzo Tokusei", KYUSHU DAIGAKU TEION CENTER DAYORI, March 2007 (2007-03-01), pages 3 - 7, XP008182423
See also references of EP 3029181A4
Attorney, Agent or Firm:
TANAKA AND OKAZAKI (JP)
Patent business corporation Tanaka and Okazaki and associates (JP)
Patent business corporation Tanaka and Okazaki and associates (JP)
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