Title:
OXIDATION-RESISTANT METALLIC TIN
Document Type and Number:
WIPO Patent Application WO/2020/179614
Kind Code:
A1
Abstract:
In the present invention, a high-purity metallic tin suitable for use in an EUV exposure device is provided through use of an oxidation-resistant metallic tin, the oxidation-resistant metallic tin containing 99.995 mass% or more of tin, and unavoidable impurities, and the thickness of an oxide film being 2.0 nm or less when the surface of a cut face of the oxidation-resistant metallic tin is measured by AES.
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Inventors:
UCHIDA TAKAHIRO (JP)
IMORI TORU (JP)
TAKEMOTO KOICHI (JP)
TSUKAMOTO SHIRO (JP)
IMORI TORU (JP)
TAKEMOTO KOICHI (JP)
TSUKAMOTO SHIRO (JP)
Application Number:
PCT/JP2020/008020
Publication Date:
September 10, 2020
Filing Date:
February 27, 2020
Export Citation:
Assignee:
JX NIPPON MINING & METALS CORP (JP)
International Classes:
C22C13/00; C22B9/04; C25C1/14
Domestic Patent References:
| WO2017145947A1 | 2017-08-31 |
Foreign References:
| JP2013189710A | 2013-09-26 | |||
| JP2018111135A | 2018-07-19 | |||
| JP2016074969A | 2016-05-12 |
Other References:
See also references of EP 3872200A4
Attorney, Agent or Firm:
AYAFUNE INTERNATIONAL PATENTS & TRADEMARKS PATENT PROFESSIONAL CORPORATION et al. (JP)
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