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Title:
OXIDE DIELECTRIC AND METHOD FOR MANUFACTURING SAME, AND SOLID STATE ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2016/013416
Kind Code:
A1
Abstract:
[Problem] To provide an oxide dielectric having excellent properties and a solid state electronic device (e.g., a capacitor, semiconductor device, or micro-electrical-mechanical system) equipped with the oxide dielectric. [Solution] An oxide layer (30) including one of the oxide dielectrics of the present invention is a layer of oxide (which may have unavoidable impurities) that includes bismuth (Bi) and niobium (Nb), and has a first crystal phase of a pyrochlore-type crystal structure and a second crystal phase of a β-BiNbO4-type crystal structure. In addition, the content of the first crystal phase and the content of the second crystal phase are adjusted in the oxide layer (30), the dielectric constant of the first crystal phase decreasing with the rise in the temperature of the oxide layer (30) in a temperature range of 25°C to 120°C and the dielectric constant of the second crystal phase increasing with the rise in the temperature of the oxide layer (30) in said temperature range.

Inventors:
SHIMODA, Tatsuya (1-1 Asahidai, Nomi-sh, Ishikawa 92, 〒9231292, JP)
INOUE, Satoshi (1-1 Asahidai, Nomi-sh, Ishikawa 92, 〒9231292, JP)
ARIGA, Tomoki (1-1 Asahidai, Nomi-sh, Ishikawa 92, 〒9231292, JP)
Application Number:
JP2015/069852
Publication Date:
January 28, 2016
Filing Date:
July 10, 2015
Export Citation:
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Assignee:
NATIONAL UNIVERSITY CORPORATION JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (1-1 Asahidai, Nomi-shi Ishikawa, 92, 〒9231292, JP)
ADAMANT CO., LTD. (16-7, Shinden 1-chome Adachi-k, Tokyo 95, 〒1238595, JP)
International Classes:
C01G33/00; C04B35/00; H01G4/12
Domestic Patent References:
WO2013069470A12013-05-16
WO2013069471A12013-05-16
WO2011089748A12011-07-28
Foreign References:
JP2007051050A2007-03-01
Other References:
See also references of EP 3173381A4
Attorney, Agent or Firm:
KOUNO, Hiroaki (Suehiro-center Bldg. 7F, 4-8 Yorikimachi, Kita-ku, Osaka-sh, Osaka 36, 〒5300036, JP)
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