Title:
OXIDE SEMICONDUCTOR AND SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/155033
Kind Code:
A1
Abstract:
Provided are: an oxide semiconductor device capable of providing a p-type semiconductor in an oxide semiconductor and having excellent transparency, mobility, and weather resistance; and a semiconductor device comprising said oxide semiconductor. This oxide semiconductor has a crystal structure including a pryochlore structure, comprises a composite oxide including Sn and at least one element selected from Nb and Ta, and has positive holes that serve as charge carriers as a result of Sn4+/(Sn2+ + Sn4+), which is the Sn4+ ratio relative to the total Sn content in the composite oxide, being 0.124 ≤ Sn4+/(Sn2+ + Sn4+) ≤ 0.148.
Inventors:
KIKUCHI NAOTO (JP)
AIURA YOSHIHIRO (JP)
SAMIZO AKANE (JP)
IKEDA SHINTAROU (JP)
AIURA YOSHIHIRO (JP)
SAMIZO AKANE (JP)
IKEDA SHINTAROU (JP)
Application Number:
PCT/JP2018/001728
Publication Date:
August 30, 2018
Filing Date:
January 22, 2018
Export Citation:
Assignee:
AIST (JP)
International Classes:
C01G35/00; B01J35/02
Domestic Patent References:
| WO2010010802A1 | 2010-01-28 |
Foreign References:
| JPS58219703A | 1983-12-21 | |||
| JP2004344733A | 2004-12-09 | |||
| JP2003117407A | 2003-04-22 | |||
| JP2003117407A | 2003-04-22 | |||
| JP2004344733A | 2004-12-09 |
Other References:
KITA MASAO ET AL.: "Synthesis of novel cation-ordered compounds with fluorite-related structure prepared by oxidation of Sn-Ta-O pyrochlore", JOURNAL OF SOLID STATE CHEMISTRY, vol. 178, no. 4, 2005, pages 1254 - 1261, XP004830525
KITA MASAO ET AL.: "alpha;-PbO2-related phase appearing in the SnIV-Ta-O system transformed from cation-ordered fluorite-related phase", JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, vol. 122, no. 10, 1 January 2014 (2014-01-01), pages 902 - 907, XP055600322, ISSN: 1882-0743, DOI: 10.2109/jcersj2.122.902
KATAYAMA SHOTA ET AL.: "Epitaxial growth of tin(II) niobate with a pyrochlore structure", JOURNAL OF CRYSTAL GROWTH, vol. 416, 2015, pages 126 - 129, XP029176029
Y. HOSOGIY. SHIMODAIRAH. KATOH. KOBAYASHIA. KUDO, CHEMISTRY OF MATERIALS, vol. 20, 2008, pages 1299
M. A. SUBRAMANIANG. ARAVAMUDANG. V. SUBBA RAO, PROGRESS IN SOLID STATE CHEMISTRY, vol. 15, 1983, pages 55
D. J. STEWART0. KNOPR. E. MEADSW. G. PARKER, CANADIAN J. CHEMISTRY, vol. 51, 1973, pages 1041 - 1049
T. BIRCHALLA. W. SLEIGHT, J. SOLID STATE CHEMISTRY, vol. 13, 1975, pages 118 - 130
Y. HOSOGIK. TANABEH. KATOH. KOBAYASHIA. KUDO, CHEMISTRY LETTERS, vol. 33, 2004, pages 28
See also references of EP 3587351A4
KITA MASAO ET AL.: "alpha;-PbO2-related phase appearing in the SnIV-Ta-O system transformed from cation-ordered fluorite-related phase", JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, vol. 122, no. 10, 1 January 2014 (2014-01-01), pages 902 - 907, XP055600322, ISSN: 1882-0743, DOI: 10.2109/jcersj2.122.902
KATAYAMA SHOTA ET AL.: "Epitaxial growth of tin(II) niobate with a pyrochlore structure", JOURNAL OF CRYSTAL GROWTH, vol. 416, 2015, pages 126 - 129, XP029176029
Y. HOSOGIY. SHIMODAIRAH. KATOH. KOBAYASHIA. KUDO, CHEMISTRY OF MATERIALS, vol. 20, 2008, pages 1299
M. A. SUBRAMANIANG. ARAVAMUDANG. V. SUBBA RAO, PROGRESS IN SOLID STATE CHEMISTRY, vol. 15, 1983, pages 55
D. J. STEWART0. KNOPR. E. MEADSW. G. PARKER, CANADIAN J. CHEMISTRY, vol. 51, 1973, pages 1041 - 1049
T. BIRCHALLA. W. SLEIGHT, J. SOLID STATE CHEMISTRY, vol. 13, 1975, pages 118 - 130
Y. HOSOGIK. TANABEH. KATOH. KOBAYASHIA. KUDO, CHEMISTRY LETTERS, vol. 33, 2004, pages 28
See also references of EP 3587351A4
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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