Title:
OXIDE SINTERED BODY, METHOD FOR MANUFACTURING SAME, AND TARGET USING SAME
Document Type and Number:
WIPO Patent Application WO/2012/121298
Kind Code:
A1
Abstract:
Provided are: a target; a method for manufacturing the target; an oxide sintered body that is useful for manufacturing the target; and a method for manufacturing the oxide sintered body; the target making it possible, even if DC sputtering is used, to form at high productivity a zinc-oxide-based transparent electroconductive film having a similar level of electroconductivity as AZO or GZO and exceptional chemical durability. This oxide sintered body substantially comprises zinc, titanium, oxygen, and at least one additional trace element (TE) selected from the group consisting of aluminum, gallium, and indium, the titanium being derived from low-valence titanium oxide represented by the formula TiO2-X (X = 0.1 to 1).
Inventors:
NAKATA KUNIHIKO (JP)
HOTTA SHOHEI (JP)
HOTTA SHOHEI (JP)
Application Number:
PCT/JP2012/055855
Publication Date:
September 13, 2012
Filing Date:
March 07, 2012
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO (JP)
NAKATA KUNIHIKO (JP)
HOTTA SHOHEI (JP)
NAKATA KUNIHIKO (JP)
HOTTA SHOHEI (JP)
International Classes:
C04B35/453; C23C14/34
Domestic Patent References:
| WO2011102425A1 | 2011-08-25 |
Foreign References:
| JP2009298649A | 2009-12-24 | |||
| JPH04317455A | 1992-11-09 | |||
| JP2011207742A | 2011-10-20 | |||
| JP2011184715A | 2011-09-22 |
Other References:
TAKUYA SAKAI ET AL.: "TZO Usumaku Tomei Dodenmaku no Tei Teikoritsuka", ANNUAL SYMPOSIUM OF THE VACUUM SOCIETY OF JAPAN YOKOSHU, vol. 50, 4 November 2009 (2009-11-04), pages 106
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
Aoki 篤 (JP)
Aoki 篤 (JP)
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Claims: