Title:
OXIDE SINTERED BODY AND SPUTTERING TARGET
Document Type and Number:
WIPO Patent Application WO/2018/066547
Kind Code:
A1
Abstract:
An oxide sintered body which contains a perovskite phase and a bixbyite phase represented by In2O3.
Inventors:
INOUE KAZUYOSHI (JP)
SHIBATA MASATOSHI (JP)
TOMAI SHIGEKAZU (JP)
SHIBATA MASATOSHI (JP)
TOMAI SHIGEKAZU (JP)
Application Number:
PCT/JP2017/035939
Publication Date:
April 12, 2018
Filing Date:
October 03, 2017
Export Citation:
Assignee:
IDEMITSU KOSAN CO (JP)
International Classes:
C04B35/01; C23C14/08; C23C14/34; H01L29/786
Domestic Patent References:
| WO2012043570A1 | 2012-04-05 | |||
| WO2015098060A1 | 2015-07-02 |
Foreign References:
| JP2008007340A | 2008-01-17 | |||
| JPH0967194A | 1997-03-11 |
Attorney, Agent or Firm:
HEIWA INTERNATIONAL PATENT OFFICE (JP)
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